Wavefront lens corrector for studying flat surfaces
نویسندگان
چکیده
The method of manufacturing and the results studies a lens corrector that converts spherical diverging front into plane one is intended for studying flat surfaces as part an interferometer with diffraction comparison wave described. A feature use aspherical convex surface maximum deviation ~ 200 μm from nearest sphere. first experimental are presented, indicating prospects using ion-beam processing to improve quality wavefront. After procedure processing, aberrations over entire aperture decreased by more than 4 times amounted parameter height difference PV = 207 nm (~ λ/3) (RMS) 19.2 λ/33). On area diameter 80%, fell nanometer level: 65 λ/10) RMS 8.3 λ/76). Keywords: corrector, interferometry, lens, processing.
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ژورنال
عنوان ژورنال: ?????? ??????????? ??????
سال: 2022
ISSN: ['0044-4642', '1726-748X']
DOI: https://doi.org/10.21883/tp.2022.13.52235.108-21